An Expert Advisor for Photolithography

Cline, Terry; Fong, Wendy; Rosenberg, Steven

An Expert Advisor for Photolithography

Terry Cline, Wendy Fong, Steven Rosenberg

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Proceedings of the Ninth International Joint Conference on Artificial Intelligence. Expert Systems. Pages 411-412.

Abstract

The Photolithography Advisor is a program for the diagnosis and correction of negative resist photolithography defects occurring during integrated circuit fabrication. Given a set of observed symptoms on a wafer, the Advisor diagnoses defects due to these symptoms and recommends corrective actio n for each. An early prototype of the program was tested in a research lab, where experimental ICs were processed. A more thorough experiment is now in progress to measure the system's performance in a manufacturing environment.

Terry Cline, Wendy Fong, and Steven Rosenberg. 1985. An Expert Advisor for Photolithography. In Proceedings of the Ninth International Joint Conference on Artificial Intelligence, IJCAI-85. IJCAI, 411–412. https://ijcai.org/proceedings/1985/78

@inproceedings{ijcai1985p78,
  title     = {An Expert Advisor for Photolithography},
  author    = {Cline, Terry and Fong, Wendy and Rosenberg, Steven},
  booktitle = {Proceedings of the Ninth International Joint Conference on
               Artificial Intelligence, {IJCAI-85}},
  publisher = {International Joint Conferences on Artificial Intelligence},
  editor    = {Aravind Joshi},
  pages     = {411--412},
  year      = {1985},
  note      = {Expert Systems},
  url       = {https://ijcai.org/proceedings/1985/78},
}

TY  - CPAPER
TI  - An Expert Advisor for Photolithography
AU  - Cline, Terry
AU  - Fong, Wendy
AU  - Rosenberg, Steven
T2  - Proceedings of the Ninth International Joint Conference on Artificial Intelligence, IJCAI-85
PB  - International Joint Conferences on Artificial Intelligence
PY  - 1985
SP  - 411
EP  - 412
UR  - https://ijcai.org/proceedings/1985/78
ER  -