{"type":"ScholarlyArticle","title":"An Expert Advisor for Photolithography","authors":[{"name":"Terry Cline","slug":"terry-cline","given":"Terry","family":"Cline","affiliation":""},{"name":"Wendy Fong","slug":"wendy-fong","given":"Wendy","family":"Fong","affiliation":""},{"name":"Steven Rosenberg","slug":"steven-rosenberg","given":"Steven","family":"Rosenberg","affiliation":""}],"abstract":"The Photolithography Advisor is a program for the diagnosis and correction of negative resist photolithography defects occurring during integrated circuit fabrication. Given a set of observed symptoms on a wafer, the Advisor diagnoses defects due to these symptoms and recommends corrective actio n for each. An early prototype of the program was tested in a research lab, where experimental ICs were processed. A more thorough experiment is now in progress to measure the system's performance in a manufacturing environment.","doi":null,"url":"https://ijcai.org/proceedings/1985/78","pdf":"https://ijcai.org/proceedings/1985/0078.pdf","markdown":"https://ijcai.org/proceedings/1985/78.md","bibtex":"https://ijcai.org/proceedings/1985/bibtex/78","volume":{"slug":"1985","title":"Proceedings of the Ninth International Joint Conference on Artificial Intelligence","short_title":"IJCAI 1985","url":"https://ijcai.org/proceedings/1985/","year":1985,"location":"Los Angeles, California, USA","dates":"","editors":"Aravind Joshi","isbn":"","publisher":"International Joint Conferences on Artificial Intelligence","doi_prefix":""},"section":"Expert Systems","track":"Expert Systems","number":78,"pages":{"first":411,"last":412},"keywords":[],"videos":[],"references":[],"license_note":"Copyright International Joint Conferences on Artificial Intelligence."}