---
title: "An Expert Advisor for Photolithography"
authors:
  - "Terry Cline"
  - "Wendy Fong"
  - "Steven Rosenberg"
doi: ""
url: "https://ijcai.org/proceedings/1985/78"
pdf: "https://ijcai.org/proceedings/1985/0078.pdf"
venue: "Proceedings of the Ninth International Joint Conference on Artificial Intelligence"
year: 1985
pages: "411-412"
track: "Expert Systems"
keywords:
---

# An Expert Advisor for Photolithography

Terry Cline, Wendy Fong, Steven Rosenberg

*Proceedings of the Ninth International Joint Conference on Artificial Intelligence*, pages 411-412.

## Abstract

The Photolithography Advisor is a program for the diagnosis and correction of negative resist photolithography defects occurring during integrated circuit fabrication. Given a set of observed symptoms on a wafer, the Advisor diagnoses defects due to these symptoms and recommends corrective actio n for each. An early prototype of the program was tested in a research lab, where experimental ICs were processed. A more thorough experiment is now in progress to measure the system's performance in a manufacturing environment.